Active control of vibration of a magnetic levitation platform
نویسندگان
چکیده
منابع مشابه
Magnetic levitation technique for active vibration control
This chapter presents an application of zero-power controlled magnetic levitation for active vibration control. Vibration isolation are strongly required in the field of high-resolution measurement and micromanufacturing, for instance, in the submicron semiconductor chip manufacturing, scanning probe microscopy, holographic interferometry, cofocal optical imaging, etc. to obtain precise and rep...
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ژورنال
عنوان ژورنال: The Journal of the Acoustical Society of America
سال: 1995
ISSN: 0001-4966
DOI: 10.1121/1.412747